Mkpuchi sputtering Magnetron bụ usoro mkpuchi vepo anụ ahụ ọhụrụ. Ọ na-eji ion nke isi iyi ion na-emepụta iji mee ka nchịkọta ahụ dị ngwa ngwa na-eme ka ike ion dị elu na-agba ọsọ, nke na-atụba elu elu. Ions na-agbanwe ike nke kinetic na atom ndị dị n'elu elu siri ike iji mee ka atom ndị dị n'elu dị ike hapụ ihe siri ike ma tinye n'elu ala. Ihe siri ike na-atụ bọmbụ bụ ihe eji akwadebe ihe nkiri na-agbapụta agbapụ, nke a na-akpọ ihe mgbaru ọsọ. Na nkenke, a na-eji usoro égbè eletrọn mee ihe na-ebupụ ma na-elekwasị anya electrons na ihe a na-eri eri, na-eme ka atom ndị ahụ na-agbapụta na-agbaso ụkpụrụ ntụgharị ọkụ ọkụ ma wepụ ihe ahụ nwere ike dị elu iji fega n'akụkụ mkpụrụ ma tinye n'ime ihe nkiri. A na-akpọ ihe a na-eri eri ihe ihe e lekwasịrị anya n'ihe. Dịka teknụzụ tozuru oke nke emepụtara, etinyere sputtering Magnetron n'ọtụtụ mpaghara. E jiri ya tụnyere usoro mkpuchi evaporation, ọ nwere uru doro anya n'ọtụtụ akụkụ. Dị iche iche nke sputtering lekwasịrị e ọtụtụ-eji na semiconductor Integrated sekit, anyanwụ photovoltaic, ndekọ mgbasa ozi, planar ngosi na workpiece n'elu mkpuchi.
Ihe mgbaru ọsọ na-ebuwanye ibu bụ nke oghere lekwasịrị anya, efere azụ na akụkụ ndị ọzọ, oghere ebumnuche bụ ihe ezubere iche nke ion beam na-agba ọsọ, ma bụrụ akụkụ bụ isi nke ebumnuche sputtering, na usoro mkpuchi mkpuchi, oghere ebumnuche kụrụ ya. ion, atom ndị dị n'elu ya na-awụsa ma tinye ya na mkpụrụ iji mee ihe nkiri kọmputa dị mkpa; n'ihi na ike dị ala nke ịdị ọcha dị elu dị elu, na mkpado sputtering kwesịrị ka etinye ya na igwe pụrụ iche iji mezue usoro mgbasa ozi, n'ime igwe ahụ bụ voltaji dị elu, ebe ikuku dị elu. Ya mere, sputtering lekwasịrị oghere nke ultra-elu ịdị ọcha ọla mkpa ka ejikọta na backplane site dị iche iche ịgbado ọkụ usoro, na backplane na-arụ ọrụ nke tumadi idozi sputtering lekwasịrị na kwesịrị inwe ezi conductivity na thermal conductivity.
Enwere ọtụtụ ụdị ebumnobi na-agbapụ, ọbụlagodi otu ihe ebumpụta ụwa nwere nkọwa dị iche iche. Dị ka usoro nhazi ọkwa dị iche iche si dị, enwere ike kewaa ebumnuche sputtering n'ụdị dị iche iche, na nhazi ndị bụ isi bụ ndị a:
Nhazi site na udi
Ogologo ebumnuche
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Ebumnuche gburugburu, ebumnuche tube
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